memsic mxr7210g/m rev.f page 1 of 8 3/24/2005 low cost, low noise 10 g dual axis accelerometer with ratiometric analog outputs mxr7210g/m features low cost resolution better than 1milli- g at 1hz dual axis accelerometer fabricated on a monolithic cmos ic on chip mixed signal processing no moving parts; no loose particle issues 50,000 g shock survival rating 5mm x 5mm x 2mm lcc package 2.7v to 5.25v single supply continuous operation compensated for sensitivity over temperature ultra low initial zero-g offset no adjustment needed outside applications computer peripherals information appliances alarms and motion detectors disk drives mxr7210g/m functional block diagram vehicle security general description the mxr7210g/m is a low cost, dual axis accelerometer fabricated on a standard, submicron cmos process. it is a complete sensing system with on-chip mixed signal processing. the mxr7210g/m measures acceleration with a full-scale range of 10 g and a sensitivity of 100mv/g @5v at 25 c . it can measure both dynamic acceleration (e.g. vibration) and static acceler ation (e.g. gravity). the mxr7210g/m design is based on heat convection and requires no solid proof mass. this eliminates stiction and particle problems associated with competitive devices and provides shock survival greater than 50,000 g, leading to significantly lower failure rate and lower loss due to handling during assembly and at customer field application. the mxr7210g/m provides two ratiometric analog outputs that are proportional to 50% of the supply at zero g acceleration. the typical noise floor is 0.4 m g / hz allowing signals below 1milli- g to be resolved at 1 hz bandwidth. the mxr7210g/m is packaged in a hermetically sealed lcc surface mount package (5 mm x 5 mm x 2 mm height) and is operational over a 0 c to 70 c(g) or a -40 c to +105 c(m) temperature range. information furnished by memsic is believe d to be accurate and reliable. however, no responsibility is assumed by memsic for its use, nor for any infringements of patents or other rights of th ird parties which may result from its use. no license is granted by implication or otherwise under any patent or patent rights of memsic. ? memsic, inc. 800 turnpike st., suite 202, north andover, ma 01845 tel: 978.738.0900 fax: 978.738.0196 www.memsic.com
memsic mxr7210g/m rev.f page 2 of 8 3/24/2005 mxr7210g/m specifications (measurements @ 25 c, acceleration = 0 g unless otherwise noted; v dd = 5.0v unless otherwise specified) parameter conditions min mxr7210g typ. max min. MXR7210M typ. max. units sensor input measurement range 1 each axis 10.0 10.0 g nonlinearity best fit straight line 0.5 1.0 0.5 1.0 % of fs alignment error 2 1.0 1.0 degrees alignment error x sensor to y sensor 0.01 0.01 degrees cross axis sensitivity 3 0.5 0.5 % sensitivity sensitivity xout, yout sensitivity xout, yout each axis v dd =5.0v v dd =3.0v 90 54 100 60 110 66 90 54 100 60 110 66 mv/g mv/g sensitivity change over temperature 4 delta from 25 c 10 15 % zero g bias level 0 g voltage xout, yout 0 g voltage xout, yout 0 g voltage xout, yout 0 g voltage xout, yout each axis v dd =5.0v v dd =5.0v v dd =3.0v v dd =3.0v 2.47 -0.3 1.46 -0.67 2.50 0.00 1.50 0.00 2.53 0.3 1.54 0.67 2.47 -0.3 1.46 -0.67 2.50 0.00 1.50 0.00 2.53 0.3 1.54 0.67 v g v g 0 g offset vs. temperature 4 delta from 25 c 1.5 5 1.5 5 m g / c noise performance noise density, rms @25 c 0.4 1.0 0.4 1.0 m g / hz frequency response 3db bandwidth 19 19 hz power supply operating voltage range 2.7 5.25 2.7 5.25 v quiescent supply current @5.0v 3.9 4.7 3.9 4.7 ma quiescent supply current @3.0v 4.0 4.9 4.0 4.9 ma aoutx and aouty outputs output high voltage output low voltage current turn-on time @5.0v supply source or sink @3.0v-5.0vsupply @5.0v supply 4.6 160 0.4 100 4.6 160 0.4 100 v v ua ms temperature range operating range 0 +70 -40 +105 c notes 1 guaranteed by measurement of initial offset and sensitivity. 2 alignment error is specifi ed as the angle between the true and indicated axis of sensitivity. 3 cross axis sensitivity is the algebrai c sum of the alignment and the inherent sensitivity errors. 4 defined as the output change from ambien t to maximum temperature or ambient to minimum temperature.
memsic mxr7210g/m rev.f page 3 of 8 3/24/2005 absolute maximum ratings* supply voltage (v dd ) ??????...-0.5 to +7.0v storage temperature ???.????-65 c to +150 c acceleration ??????????????..50,000 g *stresses above those liste d under absolute maximum ratings may cause permanent damage to the device. this is a stress rating only; the functional operation of the device at these or any other conditions above those indicated in the operational sections of this specification is not imp lied. exposure to absolute maximum rating conditions for extended periods may affect device reliability. pin description: lcc-8 package pin name description 1 nc do not connect 2 tp connect to ground 3 com common 4 nc do not connect 5 nc do not connect 6 yout y channel output 7 xout x channel output 8 v dd 2.7v to 5.25v ordering guide model package style temperature range mxr7210gl lcc8 rohs compliant 0 to 70 c mxr7210gf lcc8, pb-free 0 to 70 c MXR7210Ml lcc8 rohs compliant -40 to +105 c MXR7210Mf lcc8, pb-free -40 to +105 c all parts are shipped in tape and reel packaging. caution: esd (electrostatic discharge) sensitive device. note: the memsic logo?s arrow indicates the -x sensing direction of the device. the +y sensing direction is rotated 90 away from the +x direction following the right-hand rule. small circle indicates pin one(1). theory of operation the memsic device is a complete dual-axis acceleration measurement system fabricated on a monolithic cmos ic process. the device operation is based on heat transfer by natural convection and opera tes like other accelerometers having a proof mass. the proof mass in the memsic sensor is a gas. a single heat source, centered in the silicon chip is suspended across a cavity. equally spaced aluminum/polysilicon thermopiles (groups of thermocouples) are located equidistantly on all four sides of the heat source (dual axis). under zero acceleration, a temperature gradient is symmetrical about the heat source, so that the temperature is the same at all four thermopiles, causing them to output the same voltage. acceleration in any direction will disturb the temperature profile, due to free convection heat transfer, causing it to be asymmetrical. the temperature, and hence voltage output of the four thermopiles will then be different. the differential voltage at the thermopile outputs is directly proportional to the acceleration. there are two identical acceleration signal paths on the accelerometer, one to measure acceleration in the x-axis and one to measure acceleration in the y-axis. please visit the memsic website at www.memsic.com for a picture/graphic description of the free convection heat transfer principle.
memsic mxr7210g/m rev.f page 4 of 8 3/24/2005 mxr7210g/m pin descriptions v dd ? this is the supply input for the circuits and the sensor heater in the accelerometer . the dc voltage should be between 2.7 and 5.25 volts. refer to the section on pcb layout and fabrication suggestions for guidance on external parts and connections recommended. com ? this is the ground pin for the accelerometer . tp ? this pin should be connected to ground. xout ? this pin is the output of the x-axis acceleration sensor. the user should ensure the load impedance is sufficiently high as to not source/sink >100 a typical. while the sensitivity of this axis has been programmed at the factory to be the same as the sensitivity for the y-axis, the accelerometer can be programmed for non-equal sensitivities on the x- and y-axes. contact the factory for additional information. yout ? this pin is the output of the y-axis acceleration sensor. the user should ensure the load impedance is sufficiently high as to not source/sink >100 a typical. while the sensitivity of this axis has been programmed at the factory to be the same as the sensitivity for the x-axis, the accelerometer can be programmed for non-equal sensitivities on the x- and y-axes. contact the factory for additional information. discussion of tilt applications and resolution tilt applications: one of the most popular applications of the memsic accelerometer product line is in tilt/inclination measurement. an accelerometer uses the force of gravity as an input to determine the inclination angle of an object. a memsic accelerometer is most sensitive to changes in position, or tilt, when the accelerometer?s sensitive axis is perpendicular to the force of gravity, or parallel to the earth?s surface. similarly, wh en the accelerometer?s axis is parallel to the force of gravity (perpendicular to the earth?s surface), it is least sensitiv e to changes in tilt. table 1 and figure 1 help illustrate the output changes in the x- and y-axes as the unit is tilted from +90 to 0 . notice that when one axis has a small change in output per degree of tilt (in m g ), the second axis has a large change in output per degree of tilt. the complementary nature of these two signals permits low cost accurate tilt sensing to be achieved with the memsic device (reference application note an-00mx-007). m e m s i c figure 1: accelerometer po sition relative to gravity x-axis y-axis x-axis orientation to earth?s surface (deg.) x output ( g ) change per deg. of tilt (m g ) y output ( g ) change per deg. of tilt (m g ) 90 -1.000 0.15 0.000 17.45 85 -0.996 1.37 0.087 17.37 80 -0.985 2.88 0.174 17.16 70 -0.940 5.86 0.342 16.35 60 -0.866 8.59 0.500 15.04 45 -0.707 12.23 0.707 12.23 30 -0.500 15.04 0.866 8.59 20 -0.342 16.35 0.940 5.86 10 -0.174 17.16 0.985 2.88 5 -0.087 17.37 0.996 1.37 0 0.000 17.45 1.000 0.15 table 1: changes in tilt for x- and y-axes resolution : the accelerometer resolution is limited by noise. the output noise will vary with the measurement bandwidth. with the reduction of the bandwidth, by applying an external low pass filter, the output noise drops. reduction of bandwidth will improve the signal to noise ratio and the resolution. the output noise scales directly with the square root of the measurement bandwidth. the maximum amplitude of the noise, its peak- to- peak value, approximately defines the worst case resolution of the measurement. with a simple rc low pass filter, the rms noise is calculated as follows: noise (mg rms) = noise(mg/ hz ) * ) 6 . 1 * ) ( ( hz bandwidth the peak-to-peak noise is approximately equal to 6.6 times the rms value (for an averag e uncertainty of 0.1%). using the mxr7210g/m with operating voltages other than 5v the mxr7210g/m is tested and specified at v dd =5v; however, it can be powered with v dd as low as 2.7v or as high as 5.25v. some performance parameters will change as the supply voltage is varied. the mxr7210g/m output sensitivity will be linearly pr oportional to supply voltage. at 3v the output sensitivity is 3.0/5.0* 100mv/g =60mv/g. the zero g bias output is also ratiometric, so the zero g is normally equal to v dd /2 at all supply voltages.
memsic mxr7210g/m rev.f page 5 of 8 3/24/2005 external filters ac coupling : for applications where only dynamic accelerations (vibration) are to be measured, it is recommended to ac couple the accelerometer output as shown in figure 3. the advantage of ac coupling is that zero g offset variations from part to part and zero g offset change over temperature can be eliminated. figure 2 is a hfp (high pass filter) with a ?3db breakpoint given by the equation: rc f 2 1 = . in many applications it may be desirable to have the hfp ?3db point at a very low frequency in order to detect very low frequency accelerations. sometimes the implementation of this hfp may result in unreasonably large capacitors, and the designer may turn to digital implementations of hfps where very low frequency ?3db breakpoints can be achieved. a outx r c a outy r c a outx filtered output a outy filtered output figure 2: high pass filter low pass filter : an external low pass filter would be useful in low frequency applications such as tilt or inclination. the low pass filter limits the noise floor and improves the resolution of the accelerometer . the low pass filter shown in figure 3 has a ?3db breakpoint given by the equation: rc f 2 1 = . for the 200 hz ratiometric output device filter, c=0.1 f and r=8k ? , 5%, 1/8w. a outx r c a outy r c a outx filtered output a outy filtered output figure 3: low pass filter power supply noise rejection one capacitor is recommended for best rejection of power supply noise (reference figure 4 below). the capacitor should be located as close as possible to the device supply pin (v dd ). the capacitor lead length should be as short as possible, and surface mount capacitor is preferred. for typical applications, the capacitor can be ceramic 0.1 f. figure 4: power supply noise rejection pcb layout and fabrication suggestions 1. liberal use of ceramic bypass capacitors is recommended. it is best to solder a 0.1uf capacitor directly across v dd and com pin. 2. robust low inductance ground wiring should be used. 3. care should be taken to ensure there is ?thermal symmetry? on the pcb immediately surrounding the memsic device and that th ere is no significant heat source nearby. 4. a metal ground plane should be added directly beneath the memsic device. the size of the plane should be similar to the memsic device?s footprint and be as thick as possible. 5. vias can be added symmetrically around the ground plane. vias increase thermal isolation of the device from the rest of the pcb.
memsic mxr7210g/m rev.f page 6 of 8 3/24/2005 mxr7210g/m typical performance characteristics ( @ 25 c , unless otherwise specified) v dd =3v v dd =5v 0% 5% 10% 15% 20% 25% 30% 35% 1.46 1.47 1.49 1.50 1.51 1.53 1.54 0% 5% 10% 15% 20% 25% 30% 35% 40% 45% 50% 2.47 2.48 2.49 2.50 2.51 2.52 2.53 0% 5% 10% 15% 20% 25% 1.46 1.47 1.49 1.50 1.51 1.53 1.54 0% 5% 10% 15% 20% 25% 30% 35% 40% 45% 50% 2.47 2.48 2.49 2.50 2.51 2.52 2.53 0% 5% 10% 15% 20% 25% 30% 54 56 58 60 62 64 66 0% 5% 10% 15% 20% 25% 30% 35% 40% 45% 90 94 98 102 106 110 voltages x-axis zero g bias distribution at xout, v dd =3v percent of parts percent of parts voltages x-axis zero g bias distribution at xout, v dd =5v voltages y-axis zero g bias distribution at yout, v dd =3v per c e n t o f part s percent of parts voltages y-axis zero g bias distribution at yout, v dd =5v mv/g x-axis sensitivity distribution at xout, v dd =3v mv/g x-axis sensitivity distribution at xout, v dd =5v per c e n t o f part s per c e n t o f part s
memsic mxr7210g/m rev.f page 7 of 8 3/24/2005 0% 5% 10% 15% 20% 25% 30% 54 56 58 60 62 64 66 0% 5% 10% 15% 20% 25% 30% 35% 40% 45% 90 94 98 102 106 110 mv/g y-axis sensitivity distribution at yout, v dd =3v mv/g y-axis sensitivity distribution at yout, v dd =5v per c e n t o f part s per c e n t o f part s
memsic mxr7210g/m rev.f page 8 of 8 3/24/2005 lcc-8 package drawing fig 5: hermetically sealed package outline
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